Features：
Multiple voltage motor fully developed by ULVAC
A single motor can cover a wide range voltage, 200 to 240V / 380 to 460V.
Forced oil circulation system
Pumping speed is stable even around atmospheric pressure. It is suitable for repeat and continuous running between atmospheric pressure and vacuum.
Various options are available for special application
In addition to the standard model, we also offer models for special applications.
Applications：
Evaporation, sputtering, and ion plating
Analytical instrument and leak test system
Gas exchange, liquid filling
Vacuum dry, freeze dry, vacuum deaeration, and vacuum insulation
Vacuum chuck and vacuum molding
Other vacuum equipments
Specifications：
Model | VD30C | VD40C | VD60C | VD90C |
Designed pumping
speed | 50Hz | 30 m3/h/
(500 L/min) | 40 m3/h/
(670 L/min) | 60 m3/h/
(1000 L/min) | 90 m3/h/
(1500 L/min) |
60Hz | 36 m3/h/
(600 L/min) | 48 m3/h/
(800 L/min) | 72 m3/h/
(1200 L/min) | 108 m3/h/
(1800 L/min) |
Ultimate pressure *1 | GP Close | ≦ 0.67 Pa |
GP Open | ≦ 6.7 Pa |
Maximum water
vapor
tolerance | GP Open | 50Hz | 1300 Pa | 1360 Pa | 1320 Pa | 970 Pa |
60Hz | 1400 Pa | 1760 Pa | 2800 Pa | 2820Pa *2 |
Maximum water
vapor
capacity | GP Open | 50Hz | 190 g/h | 270 g/h | 430 g/h | 480 g/h |
60Hz | 250 g/h | 410 g/h | 1100 g/h | 1650 g/h *2 |
Motor *3 | Type of motor | Totally enclosed fan cooled 3 phase induction motor |
Energy efficiency
class | IE3 |
Power | 1.5 kW(4 poles) | 1.5 kW(4 poles) | 2.2 kW(4 poles) | 3.7 kW(4 poles) |
Voltage | 50Hz | 200 ～ 240 /380 ～ 415 V |
60Hz | 200 ～ 240 /380 ～ 460 V |
Oil | ULVOIL R-72 |
Oil capacity | 1.0 ～ 2.5 L | 2.5 ～ 4.0 L |
Cooling method | Air cooled |
Inlet port connection JIS B 2290
( ISO KF ) | VG40 equivalency / KF40 ( optional ) | VG50 equivalency / KF50 ( optional ) |
Outlet port connection JIS B 2290
( ISO KF ) | VG40 equivalency / KF40 ( optional ) |
External dimension WxDxH | 210×660×
324mm | 210×680×
324mm | 280×761×
371mm | 280×831×
371mm |
Weight | 58kg | 60kg | 90kg | 113kg |
Applicable standard | CE |
Standard accessory | A dose of oil |
Recommended oil mist trap
( Optional ) *4 | TM201: for low load operation | TM401: for low load operation |
TM401: for high load operation | TM-2: for high load operation |
Option | Oil mist trap, other oil types, gas ballast valve, ISO flange, explosion-resistant motor, special type for special application ( spec A, B and H ) |
Note) This specification uses SI measurement units. Conversion to non-SI units is as follows :
6.7 Pa = 5 × 10-2 Torr
*1 Measured with a Pirani gauge.
( Apprx. 6.7 x 10-2 Pa when measured with a McLeod vacuum gauge. )
*2 VD90C is not allowed the continuous operation in the inlet pressure at 1,000 Pa or
more and the maximum water vapor tolerance / maximum water vapor capacity
(in the continuous operation)is 1,000 (Pa) / 600 (g/h).
*3 Factory shipment setup is 200V class Δ delta connection.
Please change it to Y connection if working voltage is 400V class.
*4 High load operation means repeat pumping down between atmospheric pressure and
vacuum in short term or long time operation at 10,000 Pa (75 Torr ) or higher.
